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      The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas

      Author(s): , , , ,
      Publication date Created:
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      Journal: Plasma Sources Science and Technology
      Publisher: IOP Publishing

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          Principles of Plasma Discharges and Materials Processing

          Michael A. Lieberman, Allan Lichtenberg (2005)
          Book 0 comments Cited 824 times – based on 0 reviews
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            Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC

            C.K. Birdsall (1991)
            Article 0 comments Cited 281 times – based on 0 reviews     Review now
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              Analytical solution for capacitive RF sheath

              M.A. Lieberman (1988)
              Article 0 comments Cited 211 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Plasma Sources Science and Technology
                Abbreviated Title: Plasma Sources Sci. Technol.
                Publisher: IOP Publishing
                ISSN (Print): 0963-0252
                ISSN (Electronic): 1361-6595
                Publication date Created: February 01 2015
                Publication date (Electronic): December 09 2014
                Volume: 24
                Issue: 1
                Page: 015019
                Article
                DOI: 10.1088/0963-0252/24/1/015019
                SO-VID: 9c682dfc-3d6f-451d-bd9d-2351e7335906
                Copyright © © 2014
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                http://iopscience.iop.org/info/page/text-and-data-mining

                http://iopscience.iop.org/page/copyright

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