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      Heating mode transition in capacitively coupled CF4discharges: comparison of experiments with simulations

      Author(s): , , ,
      Publication date Created:
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      Journal: Plasma Sources Science and Technology
      Publisher: IOP Publishing

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          Principles of Plasma Discharges and Materials Processing

          Michael A. Lieberman, Allan Lichtenberg (2005)
          Book 0 comments Cited 824 times – based on 0 reviews
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            Transition between different regimes of rf glow discharges

            J. P. Boeuf, Ph. Belenguer (1990)
            Article 0 comments Cited 118 times – based on 0 reviews     Review now
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              From Fermi acceleration to collisionless discharge heating

              M.A. Lieberman, V.A. Godyak (1998)
              Article 0 comments Cited 93 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Plasma Sources Science and Technology
                Abbreviated Title: Plasma Sources Sci. Technol.
                Publisher: IOP Publishing
                ISSN (Print): 0963-0252
                ISSN (Electronic): 1361-6595
                Publication date Created: May 01 2015
                Publication date (Electronic): May 26 2015
                Volume: 24
                Issue: 3
                Page: 034006
                Article
                DOI: 10.1088/0963-0252/24/3/034006
                SO-VID: 5c0e1a09-de8d-4926-84e5-c67496680bf4
                Copyright © © 2015
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                http://iopscience.iop.org/info/page/text-and-data-mining

                http://iopscience.iop.org/page/copyright

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