Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0963-0252
ISSN
(Electronic):
1361-6595
Publication date Created:
May
01 2015
Publication date
(Electronic):
May
26 2015
Volume: 24
Issue: 3
Page: 034006
Article
DOI: 10.1088/0963-0252/24/3/034006
SO-VID: 5c0e1a09-de8d-4926-84e5-c67496680bf4
Copyright © ©
2015