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      Feasibility of micro power supplies for MEMS

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          The case for magnetically driven microactuators

          I.J. Busch-Vishniac (1992)
          Article 0 comments Cited 15 times – based on 0 reviews     Review now
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            A miniaturized high-voltage solar cell array as an electrostatic MEMS power supply

            Z. Chen, J.B. Lee, R. Arya … (1995)
            Article 0 comments Cited 14 times – based on 0 reviews     Review now
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              Microfabricated actuator with moving permanent magnet

              W Benecke, B. Wagner (2024)
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                Author and article information

                Journal
                Title: Journal of Microelectromechanical Systems
                Abbreviated Title: J. Microelectromech. Syst.
                Publisher: Institute of Electrical and Electronics Engineers (IEEE)
                ISSN (Print): 10577157
                Publication date (Print): Dec. 1997
                Volume: 6
                Issue: 4
                Pages: 355-362
                Article
                DOI: 10.1109/84.650133
                SO-VID: 99dfeffe-3673-4016-87a1-e9bf203ec182
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