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Piezoelectric properties of polycrystalline AlN thin films for MEMS application
Author(s):
K. Tonisch
,
V. Cimalla
,
Ch. Foerster
,
H. Romanus
,
O. Ambacher
,
D. Dontsov
Publication date
Created:
November 2006
Publication date
(Print):
November 2006
Journal:
Sensors and Actuators A: Physical
Publisher:
Elsevier BV
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Author and article information
Journal
Title:
Sensors and Actuators A: Physical
Abbreviated Title:
Sensors and Actuators A: Physical
Publisher:
Elsevier BV
ISSN (Print):
09244247
Publication date Created:
November 2006
Publication date (Print):
November 2006
Volume
: 132
Issue
: 2
Pages
: 658-663
Article
DOI:
10.1016/j.sna.2006.03.001
SO-VID:
4b766b6c-8ba6-450c-be65-bbbb9e64a222
Copyright ©
© 2006
License:
http://www.elsevier.com/tdm/userlicense/1.0/
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