Effect of UV wavelength on the hardening process of porogen-containing and porogen-free ultralow-k plasma-enhanced chemical vapor deposition dielectrics

Urbanowicz, Adam M.; Vanstreels, Kris; Verdonck, Patrick; Van Besien, Els; Christos, Trompoukis; Shamiryan, Denis; De Gendt, Stefan; Baklanov, Mikhail R

doi:10.1116/1.3572063

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Effect of UV wavelength on the hardening process of porogen-containing and porogen-free ultralow-k plasma-enhanced chemical vapor deposition dielectrics

Author(s): Adam M. Urbanowicz , Kris Vanstreels , Patrick Verdonck , Els Van Besien , Trompoukis Christos , Denis Shamiryan , Stefan De Gendt , Mikhail R. Baklanov

Publication date Created: May 2011

Publication date (Print): May 2011

Journal: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Publisher: American Vacuum Society

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Topology of covalent non-crystalline solids I: Short-range order in chalcogenide alloys

J.C. Phillips (1979)

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Continuous deformations in random networks

M.F. Thorpe (1983)

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Low dielectric constant materials for microelectronics

K Maex, M R Baklanov, S. Brongersma … (2003)

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Title: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Abbreviated Title: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Publisher: American Vacuum Society

ISSN (Print): 2166-2746

ISSN (Electronic): 2166-2754

Publication date Created: May 2011

Publication date (Print): May 2011

Volume: 29

Issue: 3

Page: 032201

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DOI: 10.1116/1.3572063

SO-VID: 7cf03014-3866-4f2a-9e42-67ba546a85a9

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Effect of UV wavelength on the hardening process of porogen-containing and porogen-free ultralow-k plasma-enhanced chemical vapor deposition dielectrics

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Most cited references 36

Topology of covalent non-crystalline solids I: Short-range order in chalcogenide alloys

Continuous deformations in random networks

Low dielectric constant materials for microelectronics

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