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Influence of polymer porogens on the porosity and mechanical properties of spin coated Ultra Low k dielectrics
Author(s):
V. Jousseaume
,
G. Rolland
,
D Babonneau
,
J.P. Simon
Publication date:
2009
Journal:
Thin Solid Film.
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DOI::
10.1016/j.tsf.2009.02.084
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