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      Detection of defect states in low-k dielectrics using reflection electron energy loss spectroscopy

      Author(s): , ,
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      Journal: Journal of Applied Physics
      Publisher: AIP Publishing

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          Fowler‐Nordheim Tunneling into Thermally Grown SiO2

          M. Lenzlinger, E. H. Snow (1969)
          Article 0 comments Cited 354 times – based on 0 reviews     Review now
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            Physics at Surfaces

            Andrew Zangwill (1988)
            Book 0 comments Cited 222 times – based on 0 reviews
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              Optically active oxygen-deficiency-related centers in amorphous silicon dioxide

              Linards Skuja (1998)
              Article 0 comments Cited 147 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Journal of Applied Physics
                Abbreviated Title: Journal of Applied Physics
                Publisher: AIP Publishing
                ISSN (Print): 0021-8979
                ISSN (Electronic): 1089-7550
                Publication date Created: January 28 2013
                Publication date (Print): January 28 2013
                Volume: 113
                Issue: 4
                Page: 044109
                Article
                DOI: 10.1063/1.4788980
                SO-VID: 0c20c6dd-f573-4819-9f72-1f7952d2ee65
                Copyright © © 2013
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