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Detection of defect states in low-k dielectrics using reflection electron energy loss spectroscopy
Author(s):
S.W. King
,
B. French
,
E. Mays
Publication date
Created:
January 28 2013
Publication date
(Print):
January 28 2013
Journal:
Journal of Applied Physics
Publisher:
AIP Publishing
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Fowler‐Nordheim Tunneling into Thermally Grown SiO2
M. Lenzlinger
,
E. H. Snow
(1969)
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Physics at Surfaces
Andrew Zangwill
(1988)
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Optically active oxygen-deficiency-related centers in amorphous silicon dioxide
Linards Skuja
(1998)
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Author and article information
Journal
Title:
Journal of Applied Physics
Abbreviated Title:
Journal of Applied Physics
Publisher:
AIP Publishing
ISSN (Print):
0021-8979
ISSN (Electronic):
1089-7550
Publication date Created:
January 28 2013
Publication date (Print):
January 28 2013
Volume
: 113
Issue
: 4
Page
: 044109
Article
DOI:
10.1063/1.4788980
SO-VID:
0c20c6dd-f573-4819-9f72-1f7952d2ee65
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© 2013
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