Bonding of silicon wafers for silicon‐on‐insulator

Maszara, W. P.; McKitterick, J. B.; Goetz, G.; Caviglia, A.

doi:10.1063/1.342443

Record: found
Abstract: not found
Article: not found

Bonding of silicon wafers for silicon‐on‐insulator

Author(s): W. P. Maszara , G. Goetz , A. Caviglia , J. B. McKitterick

Publication date Created: November 15 1988

Publication date (Print): November 15 1988

Journal: Journal of Applied Physics

Publisher: AIP Publishing

Read this article at

ScienceOpenPublisher

Bookmark

There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

Related collections

Most cited references 11

Record: found
Abstract: not found
Article: not found

Field Assisted Glass‐Metal Sealing

Daniel I. Pomerantz, George Wallis (1969)

0 comments Cited 121 times – based on 0 reviews      Review now

Bookmark

Record: found
Abstract: not found
Article: not found

Wafer bonding for silicon‐on‐insulator technologies

J. Lasky (1986)

0 comments Cited 98 times – based on 0 reviews      Review now

Bookmark

Record: found
Abstract: not found
Article: not found

Silicon‐to‐silicon direct bonding method

M. Shimbo, K Furukawa, K. Fukuda … (1986)

0 comments Cited 82 times – based on 0 reviews      Review now

Bookmark

All references

Author and article information

Journal

Title: Journal of Applied Physics

Abbreviated Title: Journal of Applied Physics

Publisher: AIP Publishing

ISSN (Print): 0021-8979

ISSN (Electronic): 1089-7550

Publication date Created: November 15 1988

Publication date (Print): November 15 1988

Volume: 64

Issue: 10

Pages: 4943-4950

Article

DOI: 10.1063/1.342443

SO-VID: 36731841-287e-48c8-8fc9-a96e712afaba

History

Data availability:

Comments

Comment on this article

scite_

Smart Citations

Citing PublicationsSupportingMentioningContrasting

View Citations

See how this article has been cited at scite.ai

scite shows how a scientific paper has been cited by providing the context of the citation, a classification describing whether it supports, mentions, or contrasts the cited claim, and a label indicating in which section the citation was made.