Frontiers of silicon-on-insulator

Cristoloveanu, Sorin; Celler, G. K.

doi:10.1063/1.1558223

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Frontiers of silicon-on-insulator

Author(s): G. K. Celler , Sorin Cristoloveanu

Publication date Created: May 2003

Publication date (Print): May 2003

Journal: Journal of Applied Physics

Publisher: AIP Publishing

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Most cited references 77

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Optical properties of thin films

D.E. Aspnes (1982)

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The Evolution of Silicon Wafer Cleaning Technology

Werner Kern (1990)

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Silicon on insulator material technology

M. Bruel (1995)

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Author and article information

Journal

Title: Journal of Applied Physics

Abbreviated Title: Journal of Applied Physics

Publisher: AIP Publishing

ISSN (Print): 0021-8979

ISSN (Electronic): 1089-7550

Publication date Created: May 2003

Publication date (Print): May 2003

Volume: 93

Issue: 9

Pages: 4955-4978

Article

DOI: 10.1063/1.1558223

SO-VID: 680e6a8d-793f-48c8-8018-7b28cc5cc229

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