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Thermodynamic considerations in refractory metal‐silicon‐oxygen systems
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Most cited references21
- Record: found
- Abstract: not found
- Article: not found
Refractory silicides for integrated circuits
S. P. Murarka (1980)
- Record: found
- Abstract: not found
- Article: not found
Reaction of thin metal films with SiO2 substrates
R Pretorius, J.M. Harris, M‐A. Nicolet (1978)
- Record: found
- Abstract: not found
- Article: not found
Oxidation mechanisms in WSi2thin films
S. Zirinsky, F. d’Heurle, J. Baglin … (1978)