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      Integration Technology of 30nm Generation Multi-Level NAND Flash for 64Gb NAND Flash Memory

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          Conference
          June 2007
          : 12-13
          Article
          10.1109/VLSIT.2007.4339707
          27bd3f5b-3f3c-4e26-adf3-86c3feb846c9
          © 2007
          2007 IEEE Symposium on VLSI Technology
          Kyoto, Japan
          July 12, 2007 - July 14, 2007
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