A reduced-order model for electrically actuated microbeam-based MEMS

Nayfeh, A.; Abdel-Rahman, E.M.; Younis, M.I.

doi:10.1109/JMEMS.2003.818069

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A reduced-order model for electrically actuated microbeam-based MEMS

Author(s): M.I. Younis , E.M. Abdel-Rahman , A. Nayfeh

Publication date Created: October 2003

Publication date (Print): October 2003

Journal: Journal of Microelectromechanical Systems

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

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Most cited references 12

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Applied Nonlinear Dynamics

Ali Nayfeh, Balakumar Balachandran (1995)

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Electrostatically driven vacuum-encapsulated polysilicon resonators

Harrie Tilmans, Rob Legtenberg (1994)

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Micromachined low-loss microwave switches

Z.J. Yao, S. Chen, S. Eshelman … (1999)

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Author and article information

Journal

Title: Journal of Microelectromechanical Systems

Abbreviated Title: J. Microelectromech. Syst.

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

ISSN (Print): 1057-7157

Publication date Created: October 2003

Publication date (Print): October 2003

Volume: 12

Issue: 5

Pages: 672-680

Article

DOI: 10.1109/JMEMS.2003.818069

SO-VID: 16ac54b0-c203-463a-93c7-fb1047256fd1

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