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      Vibrations of narrow microbeams predeformed by an electric field

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      Journal of Sound and Vibration
      Elsevier BV

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          The resonant gate transistor

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            M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures

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              Electrostatically driven vacuum-encapsulated polysilicon resonators

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                Author and article information

                Journal
                Journal of Sound and Vibration
                Journal of Sound and Vibration
                Elsevier BV
                0022460X
                January 2008
                January 2008
                : 309
                : 3-5
                : 600-612
                Article
                10.1016/j.jsv.2007.07.030
                8a18640e-3a2e-4f59-95b5-e1b0528b52df
                © 2008

                http://www.elsevier.com/tdm/userlicense/1.0/

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