20
views
0
recommends
+1 Recommend
0 collections
    0
    shares
      • Record: found
      • Abstract: not found
      • Article: not found

      Dynamic pull-in phenomenon in MEMS resonators

      , ,
      Nonlinear Dynamics
      Springer Nature

      Read this article at

      ScienceOpenPublisher
      Bookmark
          There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

          Related collections

          Most cited references9

          • Record: found
          • Abstract: not found
          • Book: not found

          Applied Nonlinear Dynamics

            Bookmark
            • Record: found
            • Abstract: not found
            • Article: not found

            Electrostatically driven vacuum-encapsulated polysilicon resonators

              Bookmark
              • Record: found
              • Abstract: not found
              • Article: not found

              A reduced-order model for electrically actuated microbeam-based MEMS

                Bookmark

                Author and article information

                Journal
                Nonlinear Dynamics
                Nonlinear Dyn
                Springer Nature
                0924-090X
                1573-269X
                January 18 2007
                September 29 2006
                : 48
                : 1-2
                : 153-163
                Article
                10.1007/s11071-006-9079-z
                6b5eea64-de08-4b4a-8ec6-823bea09577c
                © 2007
                History

                Comments

                Comment on this article