Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0963-0252
ISSN
(Electronic):
1361-6595
Publication date Created:
April
01 2011
Publication date
(Print):
April
01 2011
Publication date
(Electronic):
April
01 2011
Volume: 20
Issue: 2
Page: 024001
Article
DOI: 10.1088/0963-0252/20/2/024001
SO-VID: 03e2b94d-fa49-47f1-af1d-3f8d5f75f082
Copyright © ©
2011