Journal ID (publisher-id): JVTBD9
Title:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Abbreviated Title:
J. Vac. Sci. Technol. B
Publisher:
American Vacuum Society
ISSN
(Print):
0734211X
Publication date Created: 1983
Publication date
(Print):
1983
Volume: 1
Issue: 2
Page: 338
Article
DOI: 10.1116/1.582553
SO-VID: 21643a6a-5342-49a9-ac4b-7fa9f0d954b3
Copyright © ©
1983