A computer-aided design system for microelectromechanical systems (MEMCAD)

Johnson, B.P.; White, J.K.; Senturia, S.D.; Harris, R.M.; Shulman, M.A.; Nabors, K.; Kim, S.

doi:10.1109/84.128049

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A computer-aided design system for microelectromechanical systems (MEMCAD)

Author(s): S.D. Senturia , R.M. Harris , B.P. Johnson , S. Kim , K. Nabors , M.A. Shulman , J.K. White

Publication date (Print): March 1992

Journal: Journal of Microelectromechanical Systems

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

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FastCap: a multipole accelerated 3-D capacitance extraction program

K. Nabors, J. White (1991)

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The design and implementation of INGRES

Peter Kreps, Eugene Wong, Gerald Held … (1976)

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Resonant-microbridge vapor sensor

R.S. Muller, R.T. Howe (1986)

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Author and article information

Journal

Title: Journal of Microelectromechanical Systems

Abbreviated Title: J. Microelectromech. Syst.

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

ISSN (Print): 10577157

Publication date (Print): March 1992

Volume: 1

Issue: 1

Pages: 3-13

Article

DOI: 10.1109/84.128049

SO-VID: fae79b3d-1b7b-4b50-bcd2-768a1a0b66ba

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