Thermal UV treatment on SU-8 polymer for integrated optics

Wang, Xi-Bin; Sun, Jian Sheng; Chen, Chang-Ming; Sun, Xiao-Qiang; Wang, Fei; Zhang, Da-Ming

doi:10.1364/OME.4.000509

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Thermal UV treatment on SU-8 polymer for integrated optics

Author(s): Xi-Bin Wang , Jian Sun , Chang-Ming Chen , Xiao-Qiang Sun , Fei Wang , Da-Ming Zhang

Publication date Created: 2014

Publication date (Electronic): February 24 2014

Journal: Optical Materials Express

Publisher: The Optical Society

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Recent Developments in Polymer MEMS

C. Liu (2007)

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Enhancement of 153 μm emission band in NaYF_4:Er^3+,Yb^3+,Ce^3+ nanocrystals for polymer-based optical waveguide amplifiers

Xuesong Zhai, Jie Li, Shusen Liu … (2013)

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Surface graft polymerization of SU-8 for bio-MEMS applications

Mark Bachman, Nancy L. Allbritton, G Li … (2007)

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Journal

Title: Optical Materials Express

Abbreviated Title: Opt. Mater. Express

Publisher: The Optical Society

ISSN (Electronic): 2159-3930

Publication date Created: 2014

Publication date (Electronic): February 24 2014

Publication date (Print): March 01 2014

Volume: 4

Issue: 3

Page: 509

Article

DOI: 10.1364/OME.4.000509

SO-VID: ed2d703a-e67d-4606-982b-3de55aff67e8

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Thermal UV treatment on SU-8 polymer for integrated optics

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Most cited references 25

Recent Developments in Polymer MEMS

Enhancement of 153 μm emission band in NaYF_4:Er^3+,Yb^3+,Ce^3+ nanocrystals for polymer-based optical waveguide amplifiers

Surface graft polymerization of SU-8 for bio-MEMS applications

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