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      Stability of thin platinum films implemented in high-temperature microdevices

      Author(s): , , ,
      Publication date Created:
      Publication date (Print):
      Journal: Sensors and Actuators A: Physical
      Publisher: Elsevier BV

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          The Tension of Metallic Films Deposited by Electrolysis

          G. G. Stoney (1909)
          Article 0 comments Cited 625 times – based on 0 reviews     Review now
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            Structure Evolution During Processing of Polycrystalline Films

            C. Thompson (2000)
            Article 0 comments Cited 120 times – based on 0 reviews     Review now
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              Internal stresses in titanium, nickel, molybdenum, and tantalum films deposited by cylindrical magnetron sputtering

              John A. Thornton, David Hoffman (1977)
              Article 0 comments Cited 49 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Sensors and Actuators A: Physical
                Abbreviated Title: Sensors and Actuators A: Physical
                Publisher: Elsevier BV
                ISSN (Print): 09244247
                Publication date Created: May 2009
                Publication date (Print): May 2009
                Volume: 152
                Issue: 1
                Pages: 39-47
                Article
                DOI: 10.1016/j.sna.2009.03.017
                SO-VID: ec67bf75-4b56-4de6-bfd3-78f8e7eb3c1e
                Copyright © © 2009
                License:

                http://www.elsevier.com/tdm/userlicense/1.0/

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