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      Space and time resolved electric field measurements in helium and hydrogen RF-discharges

      Author(s): , ,
      Publication date (Electronic):
      Journal: Plasma Sources Science and Technology
      Publisher: IOP Publishing

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          Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC

          C.K. Birdsall (1991)
          Article 0 comments Cited 281 times – based on 0 reviews     Review now
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            Analytical solution for capacitive RF sheath

            M.A. Lieberman (1988)
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              The Gaseous Electronics Conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing discharges

              Jeffery W. Butterbaugh, M. L. Brake, M. Passow … (1994)
              Article 0 comments Cited 145 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Plasma Sources Science and Technology
                Abbreviated Title: Plasma Sources Sci. Technol.
                Publisher: IOP Publishing
                ISSN (Print): 0963-0252
                ISSN (Electronic): 1361-6595
                Publication date Created: May 01 1999
                Publication date (Print): May 13 1999
                Publication date (Electronic): January 01 1999
                Volume: 8
                Issue: 2
                Pages: 230-248
                Article
                DOI: 10.1088/0963-0252/8/2/004
                SO-VID: d4e0852b-aafa-4781-b524-aeac4d2a6627
                Copyright © © 1999
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