Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0963-0252
ISSN
(Electronic):
1361-6595
Publication date Created:
May
01 1999
Publication date
(Print):
May
13 1999
Publication date
(Electronic):
January
01 1999
Volume: 8
Issue: 2
Pages: 230-248
Article
DOI: 10.1088/0963-0252/8/2/004
SO-VID: d4e0852b-aafa-4781-b524-aeac4d2a6627
Copyright © ©
1999