Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0963-0252
ISSN
(Electronic):
1361-6595
Publication date Created:
December
01 2014
Publication date
(Electronic):
September
04 2014
Volume: 23
Issue: 6
Page: 065016
Article
DOI: 10.1088/0963-0252/23/6/065016
SO-VID: c794232a-f384-4854-906e-0fb10e5a0490
Copyright © ©
2014