Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0963-0252
Publication date Created:
May
01 2003
Publication date
(Print):
May
01 2003
Volume: 12
Issue: 2
Pages: 125-138
Article
DOI: 10.1088/0963-0252/12/2/301
SO-VID: d4763f9b-6927-46c5-b7b9-b84573109213
Copyright © ©
2003