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      O-FIB: far-field-induced near-field breakdown for direct nanowriting in an atmospheric environment

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          Abstract

          Nanoscale surface texturing, drilling, cutting, and spatial sculpturing, which are essential for applications, including thin-film solar cells, photonic chips, antireflection, wettability, and friction drag reduction, require not only high accuracy in material processing, but also the capability of manufacturing in an atmospheric environment. Widely used focused ion beam (FIB) technology offers nanoscale precision, but is limited by the vacuum-working conditions; therefore, it is not applicable to industrial-scale samples such as ship hulls or biomaterials, e.g., cells and tissues. Here, we report an optical far-field-induced near-field breakdown (O-FIB) approach as an optical version of the conventional FIB technique, which allows direct nanowriting in air. The writing is initiated from nanoholes created by femtosecond-laser-induced multiphoton absorption, and its cutting “knife edge” is sharpened by the far-field-regulated enhancement of the optical near field. A spatial resolution of less than 20 nm ( λ/40, with λ being the light wavelength) is readily achieved. O-FIB is empowered by the utilization of simple polarization control of the incident light to steer the nanogroove writing along the designed pattern. The universality of near-field enhancement and localization makes O-FIB applicable to various materials, and enables a large-area printing mode that is superior to conventional FIB processing.

          Nanotechnology: Better writing with light

          An optical version of Focused Ion Beam technology (FIB) allows nanoscale “writing” such as surface texturing, drilling and sculpting of materials to be performed in air, avoiding the need for a vacuum which limits the application of conventional FIB. The “Optical Far-field-Induced near-field Breakdown” (O-FIB) approach has been developed by Hong-Bo Sun of Tsinghua University and colleagues at Jilin University in China and Swinburne University of Technology in Austrilia. It works by creating nanoholes with a femtosecond laser, which is controlled by sophisticated optical effects. The process can cover larger areas than conventional FIB, and with a spatial resolution below 20 nanometres. The ability to be performed in an open atmosphere offers new possibilities for nanoscale writing. These range from working on industrial scale materials such as ship hulls, down to living tissues and cells.

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          Finer features for functional microdevices.

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            Ultrafast lasers—reliable tools for advanced materials processing

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              Guiding and confining light in void nanostructure.

              We present a novel waveguide geometry for enhancing and confining light in a nanometer-wide low-index material. Light enhancement and confinement is caused by large discontinuity of the electric field at high-index-contrast interfaces. We show that by use of such a structure the field can be confined in a 50-nm-wide low-index region with a normalized intensity of 20 microm(-2). This intensity is approximately 20 times higher than what can be achieved in SiO2 with conventional rectangular waveguides.
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                Author and article information

                Contributors
                hbsun@tsinghua.edu.cn
                sjuodkazis@swin.edu.au
                chenqd@jlu.edu.cn
                Journal
                Light Sci Appl
                Light Sci Appl
                Light, Science & Applications
                Nature Publishing Group UK (London )
                2095-5545
                2047-7538
                16 March 2020
                16 March 2020
                2020
                : 9
                : 41
                Affiliations
                [1 ]ISNI 0000 0004 1760 5735, GRID grid.64924.3d, State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, , Jilin University, ; Changchun, 130012 China
                [2 ]ISNI 0000 0001 0662 3178, GRID grid.12527.33, State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, , Tsinghua University, ; Beijing, 100084 China
                [3 ]ISNI 0000 0004 0409 2862, GRID grid.1027.4, Nanotechnology Facility, , Swinburne University of Technology, John St., ; Hawthorn, 3122 Vic Australia
                Author information
                http://orcid.org/0000-0003-3897-2844
                Article
                275
                10.1038/s41377-020-0275-2
                7073331
                32194955
                c5c0454d-bea5-4f3f-bd8f-c51938a7588d
                © The Author(s) 2020

                Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

                History
                : 2 February 2020
                : 23 February 2020
                : 26 February 2020
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                © The Author(s) 2020

                laser material processing,laser-produced plasmas,nanophotonics and plasmonics,lithography

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