Finer features for functional microdevices.

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Journal

Journal ID (iso-abbrev): Nature

Title: Nature

Publisher: Springer Science and Business Media LLC

ISSN: 0028-0836

ISSN (Print): 0028-0836

Publication date (Electronic): Aug 16 2001

Volume: 412

Issue: 6848

Affiliations

[1 ] Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan. kawata@ap.eng.osaka-u.ac.jp

Article

Publisher Item ID: 35089130

DOI: 10.1038/35089130

PubMed ID: 11507627

SO-VID: dee266f3-0b14-40fc-931b-7518f9a7eeba

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