[1
]Leibniz Institute for Materials Engineering (IWT), 28359 Bremen, Germany
[2
]Faculty of Production Engineering, University of Bremen, 28359 Bremen, Germany
[3
]Institute of Semiconductor Technology (IHT), Braunschweig University of Technology,
38106 Braunschweig, Germany
[4
]Laboratory for Emerging Nanometrology (LENA), Braunschweig University of Technology,
38106 Braunschweig, Germany
[5
]MAPEX Center for Materials and Processes, University of Bremen, 28359 Bremen, Germany