Synthesis of Metal Oxide Nanoparticles in Flame Sprays: Review on Process Technology, Modeling, and Diagnostics

[1 ]Leibniz Institute for Materials Engineering (IWT), 28359 Bremen, Germany

[2 ]Faculty of Production Engineering, University of Bremen, 28359 Bremen, Germany

[3 ]Institute of Semiconductor Technology (IHT), Braunschweig University of Technology, 38106 Braunschweig, Germany

[4 ]Laboratory for Emerging Nanometrology (LENA), Braunschweig University of Technology, 38106 Braunschweig, Germany

[5 ]MAPEX Center for Materials and Processes, University of Bremen, 28359 Bremen, Germany