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      Phonons and Lattice Dielectric Properties of Zirconia

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          Abstract

          We have performed a first-principles study of the structural and vibrational properties of the three low-pressure (cubic, tetragonal, and especially monoclinic) phases of ZrO2, with special attention to the computation of the zone-center phonon modes and related dielectric properties. The calculations have been carried out within the local-density approximation using ultrasoft pseudopotentials and a plane-wave basis. The fully relaxed structural parameters are found to be in excellent agreement with experimental data and with previous theoretical work. The total-energy calculations correctly reproduce the energetics of the ZrO2 phases, and the calculated zone-center phonon frequencies yield good agreement with the infrared and Raman experimental frequencies in the monoclinic phase. The Born effective charge tensors are computed and, together with the mode eigenvectors, used to decompose the lattice dielectric susceptibility tensor into contributions arising from individual infrared-active phonon modes. This work has been partially motivated by the potential for ZrO2 to replace SiO2 as the gate-dielectric material in modern integrated-circuit technology.

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          Soft self-consistent pseudopotentials in a generalized eigenvalue formalism

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            Hafnium and zirconium silicates for advanced gate dielectrics

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              Experimental and theoretical determination of the electronic structure and optical properties of three phases of ZrO2.

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                Author and article information

                Journal
                29 August 2001
                Article
                10.1103/PhysRevB.65.075105
                cond-mat/0108491
                a8d731bb-ab76-4a91-a833-9ba1e55d70ec
                History
                Custom metadata
                10 pages, with 4 postscript figures embedded. Uses REVTEX and epsf macros. Also available at http://www.physics.rutgers.edu/~dhv/preprints/zhao_zro2/index.html
                cond-mat.mtrl-sci

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