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      Effects of O vacancies and C doping on dielectric properties of ZrO2: A first-principles study

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      Applied Physics Letters
      AIP Publishing

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          Soft self-consistent pseudopotentials in a generalized eigenvalue formalism

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            High-κ gate dielectrics: Current status and materials properties considerations

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              Phonons and Lattice Dielectric Properties of Zirconia

              We have performed a first-principles study of the structural and vibrational properties of the three low-pressure (cubic, tetragonal, and especially monoclinic) phases of ZrO2, with special attention to the computation of the zone-center phonon modes and related dielectric properties. The calculations have been carried out within the local-density approximation using ultrasoft pseudopotentials and a plane-wave basis. The fully relaxed structural parameters are found to be in excellent agreement with experimental data and with previous theoretical work. The total-energy calculations correctly reproduce the energetics of the ZrO2 phases, and the calculated zone-center phonon frequencies yield good agreement with the infrared and Raman experimental frequencies in the monoclinic phase. The Born effective charge tensors are computed and, together with the mode eigenvectors, used to decompose the lattice dielectric susceptibility tensor into contributions arising from individual infrared-active phonon modes. This work has been partially motivated by the potential for ZrO2 to replace SiO2 as the gate-dielectric material in modern integrated-circuit technology.
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                Author and article information

                Journal
                Applied Physics Letters
                Appl. Phys. Lett.
                AIP Publishing
                0003-6951
                1077-3118
                November 13 2006
                November 13 2006
                : 89
                : 20
                : 202904
                Article
                10.1063/1.2388146
                8e05b1d4-92fa-4ae3-a6ea-04d32614e094
                © 2006
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