Title:
Semiconductor Science and Technology
Abbreviated Title:
Semicond. Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0268-1242
ISSN
(Electronic):
1361-6641
Publication date Created:
December
01 2005
Publication date
(Print):
December
01 2005
Volume: 20
Issue: 12
Pages: R65-R84
Article
DOI: 10.1088/0268-1242/20/12/R02
SO-VID: 79071308-0c89-4c15-bc7b-f0a87aa0b56e
Copyright © ©
2005