SrTiO3Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties

Yamamichi, Shintaro; Miyasaka, Yoichi; Takemura, Koichi; Sakuma, Toshiyuki

doi:10.1143/JJAP.30.2193

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SrTiO3Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties

Author(s): Shintaro Yamamichi , Toshiyuki Sakuma , Koichi Takemura , Yoichi Miyasaka

Publication date Created: September 30 1991

Publication date (Print): September 30 1991

Journal: Japanese Journal of Applied Physics

Publisher: Japan Society of Applied Physics

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Journal ID (publisher-id): JAPNDE

Title: Japanese Journal of Applied Physics

Abbreviated Title: Jpn. J. Appl. Phys.

Publisher: Japan Society of Applied Physics

ISSN (Print): 0021-4922

ISSN (Electronic): 1347-4065

Publication date Created: September 30 1991

Publication date (Print): September 30 1991

Volume: 30

Issue: Part 1, No. 9B

Pages: 2193-2196

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DOI: 10.1143/JJAP.30.2193

SO-VID: 45cd8a87-8b22-4f69-9208-a9e4da2795fa

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SrTiO3Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties

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