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      Structural and electrical characteristics of SrTiO3 thin films for dynamic random access memory applications

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      Journal of Applied Physics
      AIP Publishing

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          Rapid isothermal processing

          R. Singh (1988)
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            Ferroelectric materials for 64 Mb and 256 Mb DRAMs

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              Structural and electrical properties of rf‐sputtered amorphous barium titanate thin films

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                Author and article information

                Journal
                Journal of Applied Physics
                Journal of Applied Physics
                AIP Publishing
                0021-8979
                1089-7550
                June 1993
                June 1993
                : 73
                : 11
                : 7627-7634
                Article
                10.1063/1.353960
                248bd4da-dfe4-446e-b24b-7424c1405b22
                © 1993
                History

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