High-speed noncontact profiler based on scanning white-light interferometry

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Abstract

We describe a system for fast three-dimensional profilometry, of both optically smooth and optically rough surfaces, based on scanning white-light techniques. The system utilizes an efficient algorithm to extract and save only the region of interference, substantially reducing both the acquisition and the analysis times. Rough and discontinuous surfaces can be profiled without the phase-ambiguity problems associated with conventional phase-shifting techniques. The system measures steps to 100 µm, scans a 10µLm range in 5 s, and has a smooth surface repeatability of 0.5 nm.

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Three-dimensional sensing of rough surfaces by coherence radar.

T Dresel, G Häusler, H Venzke (1992)

We introduce a three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface. This differs from conventional optical systems in which the depth accuracy is limited by the aperture. Consequently, our sensor supplies high accuracy with a small aperture, i.e., we can probe narrow crevices and holes. The sensor is based on a Michelson interferometer, with the rough object surface serving as one mirror. The small coherence length of the light source is used. While scanning the object in depth, one can detect the local occurrence of interference within the speckles emerging from the object. We call this method coherence radar.

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Mirau correlation microscope

Gordon Kino, Stanley S. C. Chim (1990)

We have constructed a correlation microscope based on the Mirau interferometer configuration using a thin silicon nitride film beam splitter. This microscope provides the amplitude and phase information for the reflected signal from a sample located on the microscope-object plane. The device is remarkably insensitive to vibrations and is self-correcting for spherical and chromatic range aberrations of the objective. An imaging theory for the correlation microscope has been derived, which predicts accurately both the transverse resolution at a sharp edge and the range resolution for a perfect plane reflector. The range resolution is slightly better than that for a scanning optical microscope using a lens with the same aperture.