Title:
Journal of Micromechanics and Microengineering
Abbreviated Title:
J. Micromech. Microeng.
Publisher:
IOP Publishing
ISSN
(Print):
0960-1317
ISSN
(Electronic):
1361-6439
Publication date Created:
July
01 2003
Publication date
(Print):
July
01 2003
Publication date
(Electronic):
June
13 2003
Volume: 13
Issue: 4
Pages: S23-S33
Article
DOI: 10.1088/0960-1317/13/4/304
SO-VID: beccc7d7-87ea-4960-ab5d-679c9be76c4e
Copyright © ©
2003