Title:
Journal of Microelectromechanical Systems
Abbreviated Title:
J. Microelectromech. Syst.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
ISSN
(Print):
1057-7157
ISSN
(Electronic):
1941-0158
Publication date Created:
June
2000
Publication date
(Print):
June
2000
Volume: 9
Issue: 2
Pages: 190-197
Article
DOI: 10.1109/84.846699
SO-VID: 320ea277-4994-4ae7-a8ac-641015c5a0ad
Copyright © ©
2000