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      Electrical characteristics of TaSixNy/SiO2/Si structures by Fowler–Nordheim current analysis

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      Applied Physics Letters
      AIP Publishing

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          Fowler‐Nordheim Tunneling into Thermally Grown SiO2

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            On tunneling in metal‐oxide‐silicon structures

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              Determination of tunnelling parameters in ultra-thin oxide layer poly-Si/SiO2/Si structures

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                Author and article information

                Journal
                Applied Physics Letters
                Appl. Phys. Lett.
                AIP Publishing
                0003-6951
                1077-3118
                February 25 2002
                February 25 2002
                : 80
                : 8
                : 1403-1405
                Article
                10.1063/1.1453478
                2cbd90f3-a924-4fcf-afee-499119b0f362
                © 2002
                History

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