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Electrical characteristics of TaSixNy/SiO2/Si structures by Fowler–Nordheim current analysis
Author(s):
You-Seok Suh
,
Greg P. Heuss
,
Veena Misra
Publication date
Created:
February 25 2002
Publication date
(Print):
February 25 2002
Journal:
Applied Physics Letters
Publisher:
AIP Publishing
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Emerald: Sustainable Structures & Infrastructures
Most cited references
9
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Fowler‐Nordheim Tunneling into Thermally Grown SiO2
M. Lenzlinger
,
E. H. Snow
(1969)
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On tunneling in metal‐oxide‐silicon structures
Z. Weinberg
(1982)
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Determination of tunnelling parameters in ultra-thin oxide layer poly-Si/SiO2/Si structures
M. Depas
,
B. Vermeire
,
P.W Mertens
…
(1995)
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Author and article information
Journal
Title:
Applied Physics Letters
Abbreviated Title:
Appl. Phys. Lett.
Publisher:
AIP Publishing
ISSN (Print):
0003-6951
ISSN (Electronic):
1077-3118
Publication date Created:
February 25 2002
Publication date (Print):
February 25 2002
Volume
: 80
Issue
: 8
Pages
: 1403-1405
Article
DOI:
10.1063/1.1453478
SO-VID:
2cbd90f3-a924-4fcf-afee-499119b0f362
Copyright ©
© 2002
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