Temperature Dependence of the Elastic Constants of Doped Silicon

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Most cited references 24

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What is the Young's Modulus of Silicon?

Matthew A. Hopcroft, William D. Nix, Thomas W. Kenny (2010)

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Electronic Effects in the Elastic Constants ofn-Type Silicon

John J Hall (1967)

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Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators

Thomas W. Kenny, Renata Melamud, Manu Agarwal … (2006)

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Author and article information

Journal

Title: Journal of Microelectromechanical Systems

Abbreviated Title: J. Microelectromech. Syst.

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

ISSN (Print): 1057-7157

ISSN (Electronic): 1941-0158

Publication date Created: June 2015

Publication date (Print): June 2015

Volume: 24

Issue: 3

Pages: 730-741

Article

DOI: 10.1109/JMEMS.2014.2347205

SO-VID: 2b0b8e78-99c5-4e21-a229-9b98646a7a04

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