What is the Young's Modulus of Silicon?

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Journal

Title: Journal of Microelectromechanical Systems

Abbreviated Title: J. Microelectromech. Syst.

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

ISSN (Print): 1057-7157

ISSN (Electronic): 1941-0158

Publication date Created: April 2010

Publication date (Print): April 2010

Volume: 19

Issue: 2

Pages: 229-238

Article

DOI: 10.1109/JMEMS.2009.2039697

SO-VID: 0a5559c1-59aa-4caf-945c-a16f35180668

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