Title:
Journal of Microelectromechanical Systems
Abbreviated Title:
J. Microelectromech. Syst.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
ISSN
(Print):
1057-7157
ISSN
(Electronic):
1941-0158
Publication date Created:
June
2009
Publication date
(Print):
June
2009
Volume: 18
Issue: 3
Pages: 679-694
Article
DOI: 10.1109/JMEMS.2009.2015475
SO-VID: 292bcc43-c73f-40d0-8dfb-1c99baebe035
Copyright © ©
2009