- Record: found
- Abstract: not found
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Formation of iridium silicides from Ir thin films on Si substrates
S. Petersson ,
J. Baglin ,
W. Hammer ,
F. d’Heurle ,
T. S. Kuan ,
I. Ohdomari ,
J. de Sousa Pires ,
P. Tove
May 1979
May 1979
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Most cited references18
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Kinetics and mechanism of platinum silicide formation on silicon
J. Poate, T. C. Tisone (1974)
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Oxidation mechanisms in WSi2thin films
S. Zirinsky, F. d’Heurle, J. Baglin … (1978)
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Pt2Si and PtSi formation with high‐purity Pt thin films
W. H. Wadlin, C. Catellani, M Prudenziati … (1977)