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      Excitation Mechanisms and Sheath Dynamics in Capacitively Coupled Radio-Frequency Oxygen Plasmas

      Author(s): , , , ,
      Publication date (Electronic):
      Journal: Contributions to Plasma Physics
      Publisher: Wiley

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          Anomalous sheath heating in a low pressure rf discharge in nitrogen.

          Hopkins, Turner (1992)
          Article 0 comments Cited 55 times – based on 0 reviews     Review now
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            Space and time resolved electric field measurements in helium and hydrogen RF-discharges

            D. Luggenhölscher, U Czarnetzki, H F Döbele (1999)
            Article 0 comments Cited 42 times – based on 0 reviews     Review now
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              Absolute calibration of atomic density measurements by laser-induced fluorescence spectroscopy with two-photon excitation

              V Gathen, H F Döbele, K Niemi (2001)
              Article 0 comments Cited 41 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Contributions to Plasma Physics
                Abbreviated Title: Contrib. Plasma Phys.
                Publisher: Wiley
                ISSN: 08631042
                Publication date Created: November 2010
                Publication date (Print): November 2010
                Publication date (Electronic): November 16 2010
                Volume: 50
                Issue: 10
                Pages: 942-953
                Article
                DOI: 10.1002/ctpp.201000038
                SO-VID: 121b3956-df4a-4463-bd05-db3d168429f9
                Copyright © © 2010
                License:

                http://doi.wiley.com/10.1002/tdm_license_1.1

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