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      Crystallite coalescence: A mechanism for intrinsic tensile stresses in thin films

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      Journal of Materials Research
      Cambridge University Press (CUP)

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          Stresses and deformation processes in thin films on substrates

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            Intrinsic stress in sputter-deposited thin films

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              Stresses in thin films: The relevance of grain boundaries and impurities

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                Author and article information

                Journal
                applab
                Journal of Materials Research
                J. Mater. Res.
                Cambridge University Press (CUP)
                0884-2914
                2044-5326
                August 1999
                January 2011
                : 14
                : 08
                : 3467-3473
                Article
                10.1557/JMR.1999.0468
                0d7ef550-717e-4dfa-9b36-840d42eaab6f
                © 1999
                History

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