1
views
0
recommends
+1 Recommend
0 collections
    0
    shares
      • Record: found
      • Abstract: not found
      • Article: not found

      The effect of high-K gate dielectrics on deep submicrometer CMOS device and circuit performance

      Read this article at

      ScienceOpenPublisher
      Bookmark
          There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

          Related collections

          Most cited references6

          • Record: found
          • Abstract: not found
          • Article: not found

          Quantum-mechanical modeling of electron tunneling current from the inversion layer of ultra-thin-oxide nMOSFET's

            Bookmark
            • Record: found
            • Abstract: not found
            • Article: not found

            MOSFET transistors fabricated with high permitivity TiO/sub 2/ dielectrics

              Bookmark
              • Record: found
              • Abstract: not found
              • Article: not found

              The impact of high-κ gate dielectrics and metal gate electrodes on sub-100 nm MOSFETs

                Bookmark

                Author and article information

                Journal
                IEEE Transactions on Electron Devices
                IEEE Trans. Electron Devices
                Institute of Electrical and Electronics Engineers (IEEE)
                00189383
                May 2002
                : 49
                : 5
                : 826-831
                Article
                10.1109/16.998591
                0d76ddcc-6f5a-4066-8835-c351679bbd29
                © 2002
                History

                Comments

                Comment on this article