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      Piezoelectrically driven silicon beam force sensor

      Author(s): , , ,
      Publication date Created:
      Publication date (Print):
      Journal: Sensors and Actuators A: Physical
      Publisher: Elsevier BV

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          Integrated sensors: interfacing electronics to a non-electronic world

          K.D. Wise (1981)
          Article 0 comments Cited 8 times – based on 0 reviews     Review now
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            Thin-film ZnO as micromechanical actuator at low frequencies

            F.R. Blom, D.J. Yntema, F.C.M. Van de Pol … (1990)
            Article 0 comments Cited 7 times – based on 0 reviews     Review now
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              Resonating silicon beam force sensor

              J.H.J. Fluitman, F.R. Blom, S Bouwstra … (1989)
              Article 0 comments Cited 5 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Sensors and Actuators A: Physical
                Abbreviated Title: Sensors and Actuators A: Physical
                Publisher: Elsevier BV
                ISSN (Print): 09244247
                Publication date Created: March 1991
                Publication date (Print): March 1991
                Volume: 26
                Issue: 1-3
                Pages: 379-383
                Article
                DOI: 10.1016/0924-4247(91)87019-Y
                SO-VID: 0b080950-942a-420c-a012-1021a1ec9b90
                Copyright © © 1991
                License:

                http://www.elsevier.com/tdm/userlicense/1.0/

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