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Stoichiometric disturbances in ion implanted compound semiconductors
Author(s):
L. A. Christel
,
J. F. Gibbons
Publication date
Created:
August 1981
Publication date
(Print):
August 1981
Journal:
Journal of Applied Physics
Publisher:
AIP Publishing
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Most cited references
10
Record
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Energy Dissipation by Ions in the kev Region
J Lindhard
,
M. Scharff
(1961)
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Calculations of nuclear stopping, ranges, and straggling in the low-energy region
J. Biersack
,
W D Wilson
,
L. Haggmark
(1977)
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An application of the Boltzmann transport equation to ion range and damage distributions in multilayered targets
J Gibbons
,
S. Mylroie
,
L Christel
(1980)
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Author and article information
Journal
Title:
Journal of Applied Physics
Abbreviated Title:
Journal of Applied Physics
Publisher:
AIP Publishing
ISSN (Print):
0021-8979
ISSN (Electronic):
1089-7550
Publication date Created:
August 1981
Publication date (Print):
August 1981
Volume
: 52
Issue
: 8
Pages
: 5050-5055
Article
DOI:
10.1063/1.329448
SO-VID:
546bb753-8e28-4b99-a09c-e871182c9b44
Copyright ©
© 1981
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