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A Piezoelectric Microvalve for Compact High-Frequency, High-Differential Pressure Hydraulic Micropumping Systems
H.Q. Roberts, J.L. Steyn, K.T. Turner, J.A. Carretero, O. Yaglioglu, Y. Saggere, Y. Su., N.W. Hagood, S.M. Spearing, M.A. Schmidt, L. Hanqing
2003-01-02
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