C-Nx thin films deposited by pulsed high energy plasma bombardment

Peng, Jun; Zhang, Yafai; Yang, Size; Chen, Guanghua

doi:10.1016/0167-577X(96)80005-X

Record: found
Abstract: not found
Article: not found

C-Nx thin films deposited by pulsed high energy plasma bombardment

Author(s): Jun Peng , Yafai Zhang , Size Yang , Guanghua Chen

Publication date Created: July 1996

Publication date (Print): July 1996

Journal: Materials Letters

Publisher: Elsevier BV

Read this article at

ScienceOpenPublisher

Bookmark

There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

Related collections

Author and article information

Journal

Title: Materials Letters

Abbreviated Title: Materials Letters

Publisher: Elsevier BV

ISSN (Print): 0167577X

Publication date Created: July 1996

Publication date (Print): July 1996

Volume: 27

Issue: 4-5

Pages: 125-128

Article

DOI: 10.1016/0167-577X(96)80005-X

SO-VID: e5134dee-2b43-47fb-823b-d6c04d4d6a06

License:

https://www.elsevier.com/tdm/userlicense/1.0/

History

Data availability:

C-Nx thin films deposited by pulsed high energy plasma bombardment

Read this article at

Related collections

CHAIN Network Collection

Author and article information

Journal

Article

History

Comments

Comment on this article

Similar content 2,880

Cited by 1