Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications

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Most cited references 12

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Author and article information

Journal

Title: Applied Physics Letters

Abbreviated Title: Appl. Phys. Lett.

Publisher: AIP Publishing

ISSN (Print): 0003-6951

ISSN (Electronic): 1077-3118

Publication date Created: August 23 2010

Publication date (Print): August 23 2010

Volume: 97

Issue: 8

Page: 083501

Article

DOI: 10.1063/1.3481361

SO-VID: e15c02c7-b4d0-4da3-84ff-76b6247ce724

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