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Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements
Author(s):
Cyril Karuthedath
,
Abhilash Thanniyil Sebastian
,
Jaakko Saarilahti
,
Teuvo Sillanpaa
,
Tuomas Pensala
Publication date:
2019
Journal:
2019 IEEE International Ultrasonics Symposium (IUS)
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Digitizing Fabrication
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DOI::
10.1109/ULTSYM.2019.8925544
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