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Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications
E SERRA, M. Bawaj, A Borrielli, G di Giuseppe, S Forte, N Kralj, N. Malossi, L. Marconi, F MARÍN, F. Marino, B Morana, R Natali, G. Pandraud, A Pontin, G. A. Prodi, M. Rossi, P. M. Sarro, D Vitali, M Bonaldi, F Marin, F. MARINO, E Serra, G Di Giuseppe
2016
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