The surface morphology research of the BGaN thin films deposited by thermionic vacuum arc

Şenay, Volkan; Pat, Suat; Özen, Soner; Korkmaz, Şadan

doi:10.1016/j.vacuum.2016.10.033

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The surface morphology research of the BGaN thin films deposited by thermionic vacuum arc

Author(s): Soner Özen , Suat Pat , Volkan Şenay , Şadan Korkmaz

Publication date Created: January 2017

Publication date (Print): January 2017

Journal: Vacuum

Publisher: Elsevier BV

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Title: Vacuum

Abbreviated Title: Vacuum

Publisher: Elsevier BV

ISSN (Print): 0042207X

Publication date Created: January 2017

Publication date (Print): January 2017

Volume: 135

Pages: 50-54

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DOI: 10.1016/j.vacuum.2016.10.033

SO-VID: d693063b-e968-4177-86b7-02f02e306fe4

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https://www.elsevier.com/tdm/userlicense/1.0/

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