Title:
Journal of Microelectromechanical Systems
Abbreviated Title:
J. Microelectromech. Syst.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
ISSN
(Print):
1057-7157
ISSN
(Electronic):
1941-0158
Publication date Created:
June
2004
Publication date
(Print):
June
2004
Volume: 13
Issue: 3
Pages: 414-420
Article
DOI: 10.1109/JMEMS.2004.828740
SO-VID: d100d78d-18ec-494c-b53c-b19f492f36db
Copyright © ©
2004